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Pvd coating machine coating technology process steps and principles
Release time:
2022-03-21
In terms of ion plating, the evaporated material particles have a kinetic energy of 3000~5000 electron volts after ionization. High-speed bombardment of the workpiece not only accelerates the deposition speed, but the PVD coating machine can also penetrate the workpiece surface, injecting into the substrate to form a very deep diffusion layer. The interface diffusion depth of ion plating can reach 4~5 micrometers.
Purchase pvd coating machine When purchasing, the vendor will provide training on relevant knowledge of the pvd coating machine (such as coating technology process steps, principles, maintenance methods, machine operation precautions, etc.). So, let's learn about the pvd coating machine coating technology process steps and principles together!
The pvd coating machine coating technology steps are divided into the following four stages:
(1) Clean the workpiece. Connect the DC power supply, discharge argon ions, and bombard the workpiece surface with argon ions, causing the particles and dirt on the workpiece surface to protrude.
(2) Electroplating material vaporization: That is, vaporizing the electroplating material through AC after evaporation.
(3) Movement of electroplating ions: Atoms, molecules, or ions collide in the vaporization chamber and, after passing through a high-voltage electric field, rush toward the workpiece at high speed.
(4) Electroplating material atoms, molecules, or ions deposit in the gas. When the number of evaporated material ions on the workpiece surface exceeds the number of sputtered ions, they gradually accumulate, forming a coating that firmly adheres to the surface of the workpiece.
In terms of ion plating, the evaporated substance particles have a kinetic energy of 3000~5000 electron volts after ionization. High-speed bombardment of the workpiece not only speeds up the deposition rate but also penetrates the workpiece surface, injecting the substrate to form a very deep diffusion layer. The interface diffusion depth of ion plating can reach 4~5 micrometers.
The pvd coating machine is physical vapor deposition, divided into vacuum evaporation coating, vacuum sputtering coating, and vacuum ion coating. The pvd coating machine coating we often talk about is vacuum ion plating and vacuum sputtering plating. The PVD vacuum coating machine coating process principle is divided into the following three cases:
(1) Basic principle of vacuum evaporation: In a vacuum state, metals, metal alloys, etc., are evaporated and then deposited on the gas surface. The evaporation method is generally achieved by resistance heating, electron beam bombardment of the plating material evaporation, causing it to evaporate into a gas phase, and then deposited on the gas surface.
(2) Basic principle of sputtering coating: In a vacuum state filled with argon (Ar) gas, argon (Ar) atoms are ionized into argon ions (Ar+). The incident ions in the sputtering coating are generally obtained through glow discharge, so in the range of 10-2 Pa~10Pa, the sputtering particles are easily collided with gas molecules in the vacuum chamber during their flight through the gas, their movement direction is random, and the deposited film is uniform.
(3) Basic principle of ion plating: In a vacuum state, a plasma ionization technology is used to partially ionize the electroplating atoms into ions, simultaneously generating a large number of high-energy neutral atoms, and adding a negative bias to the electroplating substrate. In this way, under the action of the negative bias, ions are deposited on the gas surface, forming a thin film.
The above is an introduction to pvd coating machine coating technology process steps and principles. For more information, please Contact Us!
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Qingdao Wanruitong Vacuum Technology Co., Ltd
Tel: +86-15092098313
Tel: +86-15606393362
E-mail: 330314385@qq.com
Address: South of 204 National Road, Jiaozhou City, Qingdao City, Shandong Province
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