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PVD Vacuum Coating Machine
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Qingdao Wanruitong Vacuum Technology Co., Ltd
Tel: +86-15092098313
Tel: +86-15606393362
E-mail: 330314385@qq.com
Address: South of 204 National Road, Jiaozhou City, Qingdao City, Shandong Province
Product Description
PVD coating equipment is a physical deposition phenomenon. That is, argon is injected in a vacuum state, and the argon pile base target material, the target material is separated by the particles being adsorbed by the conductive goods to form a uniform and smooth surface layer.
PVD coating equipment commonly includes multi-arc ion coating equipment, DC magnetron sputtering coating equipment, intermediate frequency magnetron sputtering coating equipment, etc.
Also known as vacuum coating. The practice of vacuum plating is a relatively popular method. The products made are strong in metal and high in brightness. Compared with other coating methods, the cost is lower and the pollution to the environment is small, so it is adopted by various industries.
Technical Parameters
| Equipment Model | PVD-0708 | PVD-0809 | PVD-0910 | PVD-1012 | PVD-1212 | PVD-1215 |
| Vacuum Chamber Size | Φ700*H800 | Φ800*H900 | Φ900*H1000 | Φ1000*H1200 | Φ1200*H1200 | Φ1200*H1500 |
| Vacuum Chamber Structure | Vertical front-opening structure with exhaust system and water cooling system | |||||
| Vacuum Acquisition System | Maintenance pump + mechanical pump + Roots pump + diffusion pump or molecular pump (specific model can be configured according to customer requirements) | |||||
| Vacuum Measurement System | One Pirani (MKS), one cold cathode (MKS), one film gauge (MKS) | |||||
| Power Supply Type | DC power supply, medium-frequency power supply, pulse power supply (bias power supply, arc power supply) | |||||
| Ultimate Vacuum Index | No-load cold state 1.0-6.0x10-4Pa | |||||
| Arc Source | 6-8 units | 6-8 units | 8-12 units | 8-12 units | 10-14 units | 10-14 units |
| 200A-300A | 200A-300A | 200A-300A | 200A-300A | 200A-300A | 200A-300A | |
| Bias Power Supply | 20KW/unit | 20KW/unit | 20KW/unit | 30KW/unit | 30KW/unit | 30KW/unit |
| Magnetron Power Supply | 1-2 units | 1-2 units | 2-3 units | 2-3 units | 2-3 units | 2-3 units |
| Workpiece Rotation Method | Multi-axis planetary self-rotation, frequency conversion speed regulation (controllable and adjustable) | |||||
| Workpiece Baking Temperature | Room temperature - 300℃ to 450℃ - 600℃ controllable and adjustable (PID temperature control) | |||||
| Process Gas | 3-way or 4-way process gas flow control and display system, optional automatic gas charging system | |||||
| Argon, nitrogen, oxygen, acetylene, etc. | ||||||
| Cooling Method | Water-cooled circulation method, with an industrial cooling water tower or industrial chiller (refrigerator) or deep cold system. (Provided by the customer) | |||||
| Control Method | PLC + touch screen operation or computer control, manual, semi-automatic, automatic mode | |||||
| Supply Index | Gas pressure 0.5-0.8MPa, water temperature ≤25℃, water pressure ≥0.2MPa | |||||
| Alarm and Protection | Alarm for abnormal situations such as water shortage, overcurrent, overpressure, and circuit breakage for pumps and targets, and implement corresponding protection measures and electrical interlocking functions. | |||||
| Total Machine Power | 25-65KW | 45-85KW | 65-105KW | 85-115KW | 95-125KW | 100-130KW |
| Output Frequency | Voltage 380V±5%, frequency 50Hz (can be configured according to customer's national power standard) | |||||
| Equipment Floor Area | 15-50㎡ | 15-50㎡ | 25-55㎡ | 25-55㎡ | 35-55㎡ | 35-55㎡ |
| Remarks | Non-standard equipment can be designed and manufactured according to user requirements, and magnetron sputtering targets, medium-frequency twin targets, etc. can be added | |||||
Product Inquiry
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Qingdao Wanruitong Vacuum Technology Co., Ltd
Tel: +86-15092098313
Tel: +86-15606393362
E-mail: 330314385@qq.com
Address: South of 204 National Road, Jiaozhou City, Qingdao City, Shandong Province
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