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What are the precautions for PVD coating equipment?
Release time:
2022-07-27
The system will automatically close the high valve, at which point the vacuum chamber will be isolated from the pump group, and the pressure in the vacuum chamber will increase. If the pressure does not exceed the set alarm value within a certain time, the system will automatically proceed to the next step and enter the film deposition process. So, what precautions should be taken for PVD coating equipment?
PVD Coating Equipment What are the precautions?
The system will automatically close the high valve, at which point the vacuum chamber is isolated from the pump unit, and the pressure inside the vacuum chamber will increase. If the pressure does not exceed the set alarm value within a certain time, the system will automatically proceed to the next step and enter the coating process. So, what are the precautions for PVD coating equipment?
What are the precautions for PVD coating equipment?
1. Check whether the water circuit is smooth when starting up, make sure that the cooling tower and vacuum pump are working properly, check whether the gas circuit is smooth, and make sure that the air compressor is working properly.
2. Confirm that the film material, ion source filament, and workpiece rack in the vacuum chamber are placed as required.
3. After the process is completed, turn off the switches of the electron gun, ion source, etc., and wait until the vacuum coating equipment has cooled down before turning off the power.
4. Do not arbitrarily open the electrical cabinet and the shielding door of the vacuum chamber.
What are the process flows of PVD coating equipment?
1. The high valve is closed, the vacuum gauge is closed, and the vacuum chamber is isolated from the pump unit.
2. When the operator presses the exhaust button, the pre-connected nitrogen gas will be filled into the vacuum chamber through the inflation valve. When the pressure in the vacuum chamber reaches the preset pressure of the pressure switch, the inflation valve will close.
3. The vacuum chamber is filled with a large amount of very low vacuum, which is more conducive to heat conduction. Therefore, the cooling speed is much faster than without it, shortening the cooling time and improving production efficiency.
4. Due to the high thermal conductivity of helium, the cooling speed of helium is faster than that of nitrogen, but the cost is also higher.
5. For the rapid cooling procedure of foreign equipment, the cooling time can be shortened by 50% through the circulating cooling of the cooling gas.
What are the maintenance measures for PVD coating equipment?
1. Daily maintenance of PVD coating equipment: If any adverse signs are found in the equipment during the day's production, they should be resolved immediately. If the oil level of the mechanical pump is found to be low, it should be added. Don't think that the engine oil is replaced regularly. When maintenance is needed, the rotor of the pump may be severely worn.
2. PVD Coating Equipment Regular maintenance. In fact, every piece of equipment has its own service life. By doing daily maintenance and regular maintenance, while extending the service life of the equipment, the probability of equipment failure during production is greatly reduced, and production efficiency is also improved. In our automatic coating process, the pressure rise rate test is performed automatically. After the vacuum degree in the vacuum chamber reaches the set base vacuum of the process, the pressure rise rate test step is entered.
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Qingdao Wanruitong Vacuum Technology Co., Ltd
Tel: +86-15092098313
Tel: +86-15606393362
E-mail: 330314385@qq.com
Address: South of 204 National Road, Jiaozhou City, Qingdao City, Shandong Province
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