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Principle analysis of PVD coating machine
Release time:
2022-03-31
The size of a PVD coating machine varies depending on the requirements of the processed product. Currently, most vacuum chambers have diameters of 0.9M, 1.3M, 1.5M, 1.8M, etc. The chamber is made of stainless steel, requiring it to be rust-free and sturdy. Each part of the PVD coating machine has a connecting valve for connecting to the pump.
PVD coating machine It is currently a widely used vacuum equipment for manufacturing under vacuum conditions. It generally uses three working principles: a vacuum chamber, a vacuum unit, and an electrical control cabinet.
The size of the PVD coating machine varies depending on the requirements of the processed products. Currently, most vacuum chambers have diameters of 0.9M, 1.3M, 1.5M, 1.8M, etc. The chamber is made of stainless steel and is required to be rust-free and sturdy. Each part of the PVD coating machine has a connecting valve for connecting to the pump.
Auxiliary pumping system: The exhaust system is an important part of the PVD coating machine's vacuum system, mainly composed of a mechanical pump, a booster pump (mainly a Roots pump), and an oil diffusion pump. This exhaust system consists of "diffusion pump + mechanical pump + Roots pump + cryogenic cold trap + polycold".
The exhaust process is as follows: The mechanical pump first pumps the vacuum chamber to a low vacuum state of about 2.0*10-2pa, providing a premise for the subsequent vacuum pumping of the diffusion pump. Then, when the diffusion pump pumps the vacuum, the mechanical pump and the oil diffusion pump are connected in series to complete the pumping action.
Usage PVD coating machine During use, after completing more than 200 coating processes, the equipment should be cleaned with a saturated solution of sodium hydroxide (NaOH), repeatedly scrubbing the inner walls of the vacuum chamber. The purpose is to allow the coated aluminum (Al) to react with NaOH. After the reaction, the film peels off, releasing hydrogen. Then, clean the vacuum chamber with clean water and clean the dirt in the fine pump valve with a cloth dipped in gasoline. The PVD coating machine should be cleaned once after every 200 coating processes. When the roughing pump (slide valve pump, rotary vane pump) operates continuously for one month (half in the rainy season), the oil also needs to be changed. Unscrew the oil bolt, drain the old oil, then start the pump for a few seconds to completely drain the old oil from the pump. Screw back the oil injection bolt and add new oil to the rated amount (observe with the oil mirror).
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Qingdao Wanruitong Vacuum Technology Co., Ltd
Tel: +86-15092098313
Tel: +86-15606393362
E-mail: 330314385@qq.com
Address: South of 204 National Road, Jiaozhou City, Qingdao City, Shandong Province
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