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The components and working principle of a PVD coating machine
Release time:
2022-04-15
PVD coating machines are vacuum equipment widely used to create vacuum conditions. They generally consist of three main parts: a vacuum chamber, a vacuum unit, and an electrical control cabinet. Our company specializes in the research and development and production of PVD coating machine equipment. Our experienced technical team and high-quality After-sale Service team solve any problems encountered during equipment use. Let's learn about the components and working principles of PVD coating machines!
PVD coating machine This is currently widely used vacuum equipment for creating vacuum conditions, generally composed of three major parts: a vacuum chamber, a vacuum unit, and an electrical control cabinet. Our company specializes in the research and development and production of PVD coating machine equipment, solving any problems encountered in equipment use with an experienced technical team and a high-quality after-sales service team. So, let's learn about the components and working principles of the PVD coating machine!
PVD coating machine - The size of the vacuum chamber varies depending on the requirements of the processed product. Currently, it is mostly used in diameters of 1.3M, 0.9M, 1.5M, 1.8M, etc., made of stainless steel material, requiring no rust and firmness, and each part of the vacuum chamber has a connecting valve connecting various pumps.
Auxiliary exhaust system: The exhaust system is an important part of the PVD coating machine system, mainly composed of three major parts: a mechanical pump, a booster pump (mainly introducing Roots pump), and an oil diffusion pump. The exhaust flow is that the mechanical pump first makes the vacuum chamber a low vacuum state of less than about 2.0*10-2PA, providing a premise for the diffusion pump exhaust, and then when the diffusion pump exhausts the vacuum chamber, the mechanical pump and the oil diffusion pump are combined. However, when referring to uniformity at the atomic layer scale, that is, to achieve surface flattening of 10A to 1A, the main technical content and technical bottleneck in vacuum coating currently exist. Regarding specific control factors, each coating is explained in detail below.
Concept of film uniformity:
1. The uniformity of thickness can also be understood as roughness. From the scale of optical films (i.e., about 100A in units of 1/10 wavelength), the uniformity of the PVD coating machine is quite good, and the roughness can be easily controlled within 1/10 of the visible light wavelength. That is to say, there is no obstacle to vacuum coating for the optical properties of the film.
2. Uniformity in chemical composition:
That is to say, in the film, the atomic composition of the compound is easy to produce uneven characteristics due to the small scale. The coating is not the chemical composition of the required film, which is also the technical content of vacuum coating.
3. Uniformity of lattice order:
This determines whether the film is single crystal, polycrystalline, or amorphous, which is a hot issue in vacuum coating technology.
There are two main categories.
Evaporation film and sputtering film specifically include vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, sol-gel method, etc. I. Regarding evaporation film:
Generally, the target is heated to evaporate the surface components in the form of free radicals or ions, which settle on the substrate surface and form a thin film through the film formation process (scattered points - island structure - meandering structure - layered growth).
The uniformity of thickness mainly depends on:
1. The degree of lattice matching between the substrate material and the target material
2. Substrate surface temperature
3. Evaporation power and speed
4. Vacuum degree
5. Electroplating time and thickness.
The above is an introduction to PVD coating machine 's components and working principles. If you need to learn more, please feel free to Contact Us!
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Qingdao Wanruitong Vacuum Technology Co., Ltd
Tel: +86-15092098313
Tel: +86-15606393362
E-mail: 330314385@qq.com
Address: South of 204 National Road, Jiaozhou City, Qingdao City, Shandong Province
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