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Do you know about vacuum coating equipment?

Release time:

2022-02-14

Vacuum coating equipment mainly refers to a type of coating that needs to be carried out under high vacuum, including many types, such as vacuum ion evaporation, magnetron sputtering, molecular beam epitaxy, laser sputtering deposition, etc. The main idea of vacuum coating equipment is divided into evaporation and sputtering. The material to be coated is called the substrate, and the material to be coated is called the target material. The substrate and target are in the vacuum chamber. Evaporation coating generally refers to heating the target material so that the surface components evaporate in the form of atomic groups or ions, and then deposit on the substrate surface to form a thin film through the film formation process. For sputtering coating, it can be simply understood that the target is bombarded by electrons or high-energy lasers, and the surface components are in the form of atomic groups or

　　 Vacuum Coating Equipment This mainly refers to a type of coating that needs to be carried out under high vacuum, including many types, such as vacuum ion evaporation, magnetron sputtering, molecular beam epitaxy, and laser sputtering deposition. The main ideas of vacuum coating equipment are divided into evaporation and sputtering. The material to be coated is called the substrate, and the material to be coated is called the target material. The substrate and target are in the vacuum chamber. Evaporation coating generally refers to heating the target material, causing the surface components to evaporate in the form of atomic groups or ions, and then depositing on the substrate surface to form a thin film through the film formation process. For sputtering coating, it can be simply understood that the target is bombarded by electrons or high-energy lasers, and the surface components are sputtered out in the form of atomic groups or ions, deposited on the substrate surface, and then form a thin film through the film formation process, evaporation equipment, and evaporation equipment process.

　　Operating Procedures for Vacuum Coating Equipment

　　1. Electrical control cabinet operation: Turn on the vacuum coating equipment water pump and air source; turn on the main power; keep the pump and vacuum gauge powered on, and place the vacuum gauge at the V1 position, waiting until its value is less than 10. Then proceed to the next operation. It takes about 5 minutes; turn on the mechanical pump, pre-pump, turn on the turbomolecular pump power, start, switch the vacuum gauge to the V2 position, pump to below 2, about 20 minutes; observe that the turbomolecular pump reading reaches 250, then turn off the pump, open the front-end engine and high-level valve to continue pumping vacuum, and open the right high vacuum gauge to observe the vacuum degree after pumping vacuum to a certain degree. The electron gun power supply can only be connected when the vacuum degree reaches 210-3.

Vacuum Coating Equipment

　　2. Electron gun power supply cabinet operation: Turn on the main power supply of the vacuum coating equipment; simultaneously turn on the power supply of the electron gun control one and electron gun control two: Press the power supply and time-delay switch of the electron gun control one, the delay, power supply, and protection lights will light up. After three minutes, the delay protection light goes out. If the back door is not closed correctly or the water flow relay is malfunctioning, the protection light will stay on. During on/off, the high voltage will reach more than 10KV, the beam current can be adjusted to around 200 mA, the screen is 20V/100 mA, the filament current is 1.2A, and the deflection current fluctuates between 1~1.7.

　　3. Shutdown sequence: Turn off the vacuum coating equipment vacuum gauge, turn off the molecular pump; when the molecular pump shows 50, turn off the high valve, pre-stage, and mechanical pump in sequence, about 40 minutes; when the temperature is below 50°, turn off the maintenance pump.

　　Vacuum Coating Equipment Maintenance Methods:

1. After completing more than 200 coating processes, the vacuum coating equipment should be cleaned once.

2. When the low vacuum pump operates continuously for one month, the new oil needs to be replaced. Method: Unscrew the oil injection bolt, drain the old oil, then start the pump for a few seconds to completely drain the old oil in the pump. Screw back the oil injection bolt and add new oil to the rated amount. After continuous use for more than half a year, when changing the oil, open the oil cover and wipe off the dirt in the box with a cloth.

3. Vacuum Coating Equipment Diffusion pump has been used continuously for more than 6 months, the pump speed is significantly slower or the operation is improper. Fill with air, remove the connecting water pipe, remove the electric furnace plate, unscrew the nozzle once, first clean the pump cavity and pump body with gasoline, then clean with detergent mixed with water, and then clean with clean water. After the water evaporates, install the pump body, add new diffusion pump oil, put it back in the body, connect the water pipe, and check for leaks before restarting the vacuum coating equipment.

Key words:

What are the classifications of vacuum coating equipment?

Actual requirements for mold PVD coating equipment

What are the classifications of vacuum coating equipment?

Actual requirements for mold PVD coating equipment