Leak detection methods for shared PVD coating equipment
Release time:
2022-05-03
Leak detection is a necessary measure to ensure the vacuum level of PVD coating equipment. Vacuum level directly affects the coating effect, so leak detection for PVD coating equipment is essential.
Shared pvd coating equipment Leak detection method
Leak detection is a test measure to ensure the vacuum degree of pvd coating equipment. The vacuum degree directly affects the coating effect, so leak detection of pvd coating equipment is essential.
Generally speaking, air leaks in the vacuum chamber are caused by some holes on the chamber wall or joints in front of the components. When the pumping system pumps air, the pressure in the vacuum chamber decreases, and the pressure difference between the inside and outside causes gas to flow from the high-pressure outside to the low-pressure vacuum chamber, causing a decrease in vacuum.
In the leak detection process of pvd coating equipment, in order to do a good job of leak detection, the following issues should be noted.
1. Confirm whether the equipment of the pvd coating equipment manufacturer has any water leakage. Because the workpiece material will generate gas to varying degrees after heating, it may be mistaken for gas flowing in from the outside, which is a false leak. This situation should be ruled out.
2. Test the gas sealing performance of the vacuum chamber. Ensure that the airtightness meets the requirements.
3. Check the size, shape, location, and leakage rate of the leak hole, formulate a solution and implement it.
4. Determine the small leak detection rate and leak detection sensitivity of the detection instrument of the pvd coating equipment manufacturer in order to detect gas leaks on a large scale, avoid ignoring certain leak holes, and improve the accuracy of leak detection.
5. Master the reaction time and elimination time of the leak detector. Grasp the time to ensure that the leak detector works properly. If the time is short, the leak detection effect will definitely be poor. If the time is long, it will waste leak detection gas and manpower and electricity.
6. It is also necessary to avoid blocking the leak holes of the pvd coating equipment manufacturer. Sometimes, due to operational errors, during the leak detection process, some dust or liquid blocks the leak holes, thinking that there are no leak holes in this position. However, when these plugs do not block the leak holes due to increased internal and external pressure differences or other reasons, the leak still exists.
Doing a good pvd coating equipment leak detection work is very important. There are many reasons for the decrease in vacuum. We should solve these reasons one by one to stabilize the coating effect.
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